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• Research and development
• Nanotechnology
• Silicon wafer preparation
• Creation of dielectric and conductive layers
• Photolithography
• Liquid chemical etching and washing
• Ion beam etching
• Reactive ion etching
• Gas-phase etching
• Synthesis of carbon nanotubes and graphene
• Vacuuming and encapsulation

Gas-phase etching

Selective gas-phase isotropic etching processes of dielectric layers