INME RAS
Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences
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Research and-Development
Nanotechnology
Synthesis of carbon nanotubes and graphene
Research and development
Nanotechnology
Silicon wafer preparation
Creation of dielectric and conductive layers
Photolithography
Liquid chemical etching and washing
Ion beam etching
Reactive ion etching
Gas-phase etching
Synthesis of carbon nanotubes and graphene
Vacuuming and encapsulation
Synthesis of carbon nanotubes and graphene
The process of obtaining CNT arrays
The process of obtaining graphene layers
