CRYSTALLIZATION OF AMORPHOUS TITANIUM OXIDE FILMS UPON ANNEALING IN AN OXYGEN ATMOSPHERE

Bulyarskiy S.V., Koiva D.A., Gusarov G.G., Latipov E.V., Rudakov G.A., Svetukhin V.V.

Materials Science and Engineering: B. 2022. Т. 283. С. 115802.