FABRICATION OF MICRO-OPTICAL CONNECTORS FOR ELECTRO-OPTICAL SENSOR DEVICES BY A COMBINED FEMTOSECOND LASER SYSTEM

Epifanov E.O., Asharchuk I.M., Minaev N.V., Tarkhov M.A., Timofeeva E.R., Trofimov I.V., Obydennov D.V., Li W., Gonchukov S.A.

Laser Physics Letters. 2021. Т. 18. № 3. С. 036201.