Structural diagnostics, elemental and characteristic analysis of modern micro- and nanosystems using analytical SEM/FIB tools

A.Tagachenkov, E. Zenova,Y. Anufriev1, V.Dubrovinskiy. Structural diagnostics, elemental and characteristic analysis of modern micro- and nanosystems using analytical SEM/FIB tools // The International Conference “Micro- and Nanoelectronics – 2012” (ICMNE-2012) including the extended Session “Quantum Informatics” (QI-2012) and the Workshop "Silicon-on-Insulator" (SOI-2012) will be held on October 1-5, 2012 at the “Lipki” resort, Zvenigorod, Moscow Region, Russia. P. S1-02