INME RAS
Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences 
Formation of an Array of Ordered Nanocathodes Based on Carbon Nanotubes by Nanoimprint Lithography and PECVD Processes
01.12.2014
D.G. Gromov, A.S. Shulyat’ev, V.I. Egorkin, A.A. Zaitsev, S.N. Skorik, V.A. Galperin, A.A. Pavlov, A.A. Shamanaev // Formation of an Array of Ordered Nanocathodes Based on Carbon Nanotubes by Nanoimprint Lithography and PECVD Processes // Semiconductors // 2014, Vol.48, No13. - P.1732-1734.
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