INME RAS
Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences 
Fabrication technology of CNT-Nickel Oxide based planar pseudocapacitor for MEMS and NEMS
01.12.2015
E.A. Lebedev, E.P. Kitsyuk, I.M. Gavrilin, D.G. Gromov, N.E. Gruzdev, S.A. Gavrilov, A.A. Dronov, A.A. Pavlov // Fabrication technology of CNT-Nickel Oxide based planar pseudocapacitor for MEMS and NEMS // Journal of Physics: Conference Series 643 (2015) 012092 (doi:10.1088/1742-6596/643/1/012092). - P.1-5.
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