INME RAS
Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences 
Study of the technology of the plasma nanostructuring of silicon to form highly efficient emission structures
01.12.2015
Galperin V.A., Kitsyuk E.P., Shamanaev A.A. // Study of the technology of the plasma nanostructuring of silicon to form highly efficient emission structures // Semiconductors, Volume 49, Issue 13, 1 December 2015, Pages 1731-1734, ISSN: 10637826, DOI: 10.1134/S1063782615130072.
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