Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (INME RAS) is involved in fundamental scientific research in the field of nanotechnology as applied to and based on microelectronics.
The Institute was founded on 27 June 2006.
During the initial period of formation and development, the director and organizer of the Institute was Yuri V. Gulyaev. Since December 2009 till the present time Alexander N. Saurov, member of RAS, has headed the Institute.
The main goals of the Institute are:
- carry out research in the field of micro- and nanotechnologies and search for cutting-edge technological solutions for the applied use:
- generate analytical, methodological and forecast information through integrated scientific analysis of nanotechnology evolution in microelectronics and for the Russian Academy of Sciences and the Ministry of Education and Science of the Russian Federation;
- do research and development in the field of microelectronics. Develop processes for chip design, training and work placement;
- make profit out of professional competence to provide services in the field of microelectronics technology analysis and development.
Applied research:
- research and development in the field of CMOS logic devices with built-in mask-configured memory, CMOS circuits integrated with MEMS/NEMS based on structured materials to be used in medicine, science, automotive and other industries;
- training, process development and experimental design at our own laboratories for processing 100 mm and 300 mm plates.
Our scientific approach is generally based on the principles of heterogeneous integration – traditional technological process combined with special stages in order to create nano-core micro-devices and to expand crystal functions. Major lines of R&D and implementation: silicon-and-carbon electronics, MEMS and NEMS, intelligent sensors, biochips, implantable medical micro-devices.
