Features of metal-assisted chemical etching of silicon with different metals films and clusters catalysts


01.12.2016

O. Pyatilova, А. Sysa, S. Gavrilov, A. Savitskiy, A. Shuliatyev, A. Dudin, A. Pavlov Features of metal-assisted chemical etching of silicon with different metals films and clusters catalysts //Extended Abstracts of the 10th International Conference PSST 2016 (Porous Semiconductors - Science and Technology) – 2016. – P. 82-83 (02-Р2-11)