Use of thin film of a Co15Ti40N35 alloy for CVD catalytic growth of carbon nanotubes


01.12.2016

Gromov D.G., Dubkov S.V., Pavlov A.A., Skorik S.N., Trifonov A.Y., Shulyatev A.S., Shaman Y.P., Rygalin B.N. // Use of thin film of a Co15Ti40N35 alloy for CVD catalytic growth of carbon nanotubes // Russian Microelectronics, Volume 45, Issue 2, 1 March 2016, Pages 98-104, ISSN: 10637397 DOI: 10.1134/S1063739716020050