Metal-assisted chemical etching of silicon with different metal films and clusters: A review


01.12.2016

O. Pyatilova, S. Gavrilov, A. Sysa, A. Savitsky, A. Shuliatyev, A. Dudin, A. Pavlov. Metal-assisted chemical etching of silicon with different metal films and clusters: A review //Proceedings of the International Conference «Micro- and Nanoelectronics – 2016» ICMNE – 2016 Book of Abstracts. P. 75.